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Laser interferometer - precision calibration

Laser interferometer - precision calibration

  • Categories:Applications
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  • Time of issue:2020-05-13
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(Summary description)

Laser interferometer - precision calibration

(Summary description)

  • Categories:Applications
  • Author:
  • Origin:
  • Time of issue:2020-05-13
  • Views:0
Information

The laser interferometer of RENISHOW(England) and the secondary element calibrator of HEXAGON(Sweden) were adopted.
The laser interferometer has a high resolution of 0.001μm. We calibrate each motion axis with high precision, and the absolute positioning accuracy is less than ±1μm. The repeated positioning accuracy is less than ±0.5μm. With the advanced double drive gantry algorithm, it provides a reliable assurance for high precision micro-assembly process.