The laser interferometer of RENISHOW(England) and the secondary element calibrator of HEXAGON(Sweden) were adopted.
The laser interferometer has a high resolution of 0.001μm. We calibrate each motion axis with high precision, and the absolute positioning accuracy is less than ±1μm. The repeated positioning accuracy is less than ±0.5μm. With the advanced double drive gantry algorithm, it provides a reliable assurance for high precision micro-assembly process.