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Laser interferometer - precision calibration
- Categories:Applications
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- Time of issue:2020-05-13
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(Summary description)
Laser interferometer - precision calibration
(Summary description)
- Categories:Applications
- Author:
- Origin:
- Time of issue:2020-05-13
- Views:0
Information
The laser interferometer of RENISHOW(England) and the secondary element calibrator of HEXAGON(Sweden) were adopted.
The laser interferometer has a high resolution of 0.001μm. We calibrate each motion axis with high precision, and the absolute positioning accuracy is less than ±1μm. The repeated positioning accuracy is less than ±0.5μm. With the advanced double drive gantry algorithm, it provides a reliable assurance for high precision micro-assembly process.