2020-01-03
Micro-electromechanical systems, MEMS micro/mechanical/micro system) MEMS sensor is the main advantage is small volume, light weight, low power consumption, high reliability, high sensitivity, easy integration and so on, is the main force of the micro sensor, is gradually replacing the traditional mechanical sensors, in almost every field research, whether it is consumer electronics, automotive, and aerospace, machinery, chemical industry and medicine fields.