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MicroASM AMS invert bonding machine

AM-S platform is an off-line automatic micro assembly system developed by the company, which can be equipped with nozzle heating module, material tray/wafer placing plate, ultrasonic module, laser heating module, UV dispensing and curing module, hot nitrogen and formic acid process protection gas module, base preheating module, process monitoring module, chip flip welding module.


  • DESCRIPTION
  • key Parameter
  • Application Area
  • Related Processes
  • Product Advantages
  • AM-S platform is an off-line automatic micro assembly system developed by the company, which can be equipped with nozzle heating module, material tray/wafer placing plate, ultrasonic module, laser heating module, UV dispensing and curing module, hot nitrogen and formic acid process protection gas module, base preheating module, process monitoring module, chip flip welding module. 

     The platform features a marble bridge structure and core motion-related components from the Israeli military brand ELMO drive system and TECNOTION, a top line Dutch linear drive motor which achieves a 0.1 μ resolution and 0.5 μ single-axis repeat positioning accuracy. 

    Company's software system integrates equipment internal temperature control, mount precision self-tuning, mount data analysis and other functional modules. We can customize the process, software and module for different customer requirements, and combine the application of equipment with the actual process depth of customers.

  • type

    AM-5S

    AM-10S

    Lighting system

    RGB panchromatic ring light source

    Mounting accuracay

     ±2.5μm 3sigma

    ±5μm 3sigma

     Process monitoring system (optional)

    Can be record

    Way of work

     

    Off-line automatic 

    Off-line automatic 

     Gripper pickup tool head

        customized   

    Operating range

    200*300mm 

    200*300mm

    Suction nozzle

       customized  

     Mount device size range

    0.03-40mm

    0.03-40mm

      Fixed feeding method 

    Gel-pack,Tray,Waferpack etc,

    Comprehensive mounting accuracy

    ±2.5μm 3sigma

    ±5μm 3sigma

    Eutectic module (optional)

    30℃~500

     XY driven form

    Linear motor

    Linear motor

     Process protection gas (optional) 

     Hot nitrogen

     Displacement

    distance

    X:300mm Y:350mm

    X:300mm Y:350mm

     Dispensing system (optional) 

    Musashi  dispensing system is compatible with UV dispensing, epoxy dispensing and silver dispensing

     

    Z:150mm  T:360°

     Z:150mm  T:360°

     Curing system (optional)

     Uv curing/heat curing

    XY resolution

     0.5μ

    Height measurement (optional)

     0.005mm Keenshi laser measures 0.005 mm

    Z resolution

     0.5μ

     Laser hot pressing bonding system (optional)

     MicroASM 25-1000℃

     T resolution

    0.003°

    0.005°

     Ultrasonic hot pressing bonding system (optional)

    MicroASM 25~450℃

     Bonding force control

     20-500g 

    20-500g 

    Access requirements

    220 power 10a0.5 mpa compressed air   

    Upper visual system

    Dimensions and weight 

    1050X1550X1850mm(not including monitor)1800kg

     Lower visual system

     1μ 

     2μ 

    weight

    1000kg

     

     

     

  • MEMS encapsulation

    Flip chip bonding

    Formal chip bonding

    Wafer level package

    Optical module package

    Sensor package

    Mini LED mounting

  • Laser heating

    Adhesive technology

    Curing (uv, temperature)

    Eutectic welding gold tin and indium

    Mems assembly

    Hot pressing

    Wafer level high precision adhesive

  • Function modules can be customized according to different customer needs

    Can be customized according to different customer requirements process

    Wafer level high precision chip mount   

    The machine can be assembled automatically without the influence of human factors

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